Correlation of optical and electrical test structures for characterisation of copper self-annealing (2012)

First Author: Murray J
Attributed to:  An Innovative Electronics Manufacturing Research Centre funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/icmts.2012.6190635

Publication URI: http://dx.doi.org/10.1109/icmts.2012.6190635

Type: Conference/Paper/Proceeding/Abstract

ISBN: 978-1-4673-1027-7