Tungsten-Based SOI Microhotplates for Smart Gas Sensors (2008)

First Author: Ali S
Attributed to:  Nano-structured micro-power smart gas sensors funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/JMEMS.2008.2007228

Publication URI: http://dx.doi.org/10.1109/JMEMS.2008.2007228

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 6