Tungsten-Based SOI Microhotplates for Smart Gas Sensors (2008)
Attributed to:
Nano-structured micro-power smart gas sensors
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2008.2007228
Publication URI: http://dx.doi.org/10.1109/jmems.2008.2007228
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 6