On Characterizing Microelectromechanical Processes Using Coupled Resonators (2012)

First Author: Choubey B

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/JMEMS.2012.2190821

Publication URI: http://dx.doi.org/10.1109/JMEMS.2012.2190821

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 4