Super-High-Frequency SAW Resonators on AlN/Diamond (2012)
Attributed to:
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/led.2012.2183851
Publication URI: http://dx.doi.org/10.1109/led.2012.2183851
Type: Journal Article/Review
Parent Publication: IEEE Electron Device Letters
Issue: 4