Piezoelectrically actuated Circular Diaphragm Resonator mass sensors (2012)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/nems.2012.6196726

Publication URI: http://dx.doi.org/10.1109/nems.2012.6196726

Type: Conference/Paper/Proceeding/Abstract

ISBN: 978-1-4673-1122-9