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Self-Aligned Silicidation of Surround Gate Vertical MOSFETs for Low Cost RF Applications (2010)

First Author: Hakim M

Attributed to: Feasibility of Novel Deca-nanometer vertical MOSFETs for low-cost Radio Frequency Application funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/ted.2010.2082293

Publication URI: http://dx.doi.org/10.1109/ted.2010.2082293

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Electron Devices

Issue: 12