Proton exchange and diffusion in LiNbO3 using inductance coupled high density plasma (2007)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.2746052
Publication URI: http://dx.doi.org/10.1116/1.2746052
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Issue: 4