Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge (2011)

First Author: Bradley J
Attributed to:  The Study of Magnetized Electronegative Depositing Plasmas funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.3580934

Publication URI: http://dx.doi.org/10.1116/1.3580934

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 3