Surface and thickness measurement of a transparent film using wavelength scanning interferometry. (2012)
Attributed to:
EPSRC Centre for Innovative Manufacturing in Advanced Metrology
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/oe.20.021450
PubMed Identifier: 23037266
Publication URI: http://europepmc.org/abstract/MED/23037266
Type: Journal Article/Review
Volume: 20
Parent Publication: Optics express
Issue: 19
ISSN: 1094-4087