Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors (2011)

First Author: Gancedo L

Attributed to: Film Bulk Acoustic Resonator-based Ultra-Sensitive Biosensor Array Using Low Cost Piezoelectric Polymer as the Active Material funded by EPSRC

No abstract provided

Type: Journal Article/Review

Parent Publication: International Journal of Nanomanufacturing

Issue: 3/4