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Modelling and measurement of polishing tool influence functions for edge control (2011)

First Author: Li H

Attributed to: Ultra Precision Surfaces - Translation Grant funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.2971/jeos.2011.11048

Publication URI: http://dx.doi.org/10.2971/jeos.2011.11048

Type: Journal Article/Review

Parent Publication: Journal of the European Optical Society-Rapid Publications