Single-step 3D nanolithography using plasma polymerized hexane films (2012)

First Author: Pedersen R

Attributed to: Artificial Photosynthesis: Solar Fuels funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2012.07.054

Publication URI: http://dx.doi.org/10.1016/j.mee.2012.07.054

Type: Journal Article/Review

Parent Publication: Microelectronic Engineering