Titanium arsenide films from the atmospheric pressure chemical vapour deposition of tetrakisdimethylamidotitanium and tert-butylarsine (2011)

First Author: Thomas T

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1039/c1dt10457h

PubMed Identifier: 21743910

Publication URI: http://europepmc.org/abstract/MED/21743910

Type: Journal Article/Review

Parent Publication: Dalton Transactions

Issue: 40

ISSN: 1477-9226