Atomic resolution top-down nanofabrication with low-current focused-ion-beam thinning (2012)
Attributed to:
Electrical and Mechanical Properties of Three-Dimensional Tungsten Nanostructures
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mee.2012.07.108
Publication URI: http://dx.doi.org/10.1016/j.mee.2012.07.108
Type: Journal Article/Review
Parent Publication: Microelectronic Engineering