Nanoindentation of polysilicon and single crystal silicon: Molecular dynamics simulation and experimental validation (2014)
Attributed to:
Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/47/27/275304
Publication URI: http://dx.doi.org/10.1088/0022-3727/47/27/275304
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 27