Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities (2013)

First Author: Greb A
Attributed to:  Queen's University Belfast Plasma Physics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4804280

Publication URI: http://dx.doi.org/10.1063/1.4804280

Type: Journal Article/Review

Parent Publication: Physics of Plasmas

Issue: 5