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Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas (2014)

First Author: Greb A

Attributed to: Interactions between micro-plasma devices funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4903931

Publication URI: http://dx.doi.org/10.1063/1.4903931

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 23