Silica based polishing of {100} and {111} single crystal diamond. (2014)
Attributed to:
Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1468-6996/15/3/035013
PubMed Identifier: 27877689
Publication URI: http://europepmc.org/abstract/MED/27877689
Type: Journal Article/Review
Volume: 15
Parent Publication: Science and technology of advanced materials
Issue: 3
ISSN: 1468-6996