Energy resolved actinometry for simultaneous measurement of atomic oxygen densities and local mean electron energies in radio-frequency driven plasmas (2014)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4903931
Publication URI: http://dx.doi.org/10.1063/1.4903931
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 23