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Tailoring the nonlinear frequency coupling between odd harmonics for the optimisation of charged particle dynamics in capacitively coupled oxygen plasmas (2015)

First Author: Gibson A

Attributed to: Metrology concepts for a new generation of plasma manufacturing with atom-scale precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/1.4907567

Publication URI: http://dx.doi.org/10.1063/1.4907567

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 5