Tailoring the nonlinear frequency coupling between odd harmonics for the optimisation of charged particle dynamics in capacitively coupled oxygen plasmas (2015)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4907567
Publication URI: http://dx.doi.org/10.1063/1.4907567
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 5