Strong ionization asymmetry in a geometrically symmetric radio frequency capacitively coupled plasma induced by sawtooth voltage waveforms. (2015)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1103/physrevlett.114.125002
PubMed Identifier: 25860749
Publication URI: http://europepmc.org/abstract/MED/25860749
Type: Journal Article/Review
Volume: 114
Parent Publication: Physical review letters
Issue: 12
ISSN: 0031-9007