Sub 100º C Deposition of Amorphous Hafnium Oxide using a High Rate Sputtering Technique (2012)

First Author: Flora Li (Author)

Attributed to: IKC in Advanced Manufacturing Technologies for Photonics and Electronics - Exploiting Molecular and Macromolecular Materials [MMM] funded by EPSRC

No abstract provided

Type: Conference/Paper/Proceeding/Abstract

Parent Publication: E-MRS 2012 SPRING MEETING