Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist (2011)
Attributed to:
Silicon-based Integrated Single-Spin Quantum Information Technology
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Publication URI: http://eprints.soton.ac.uk/id/eprint/272665
Type: Conference/Paper/Proceeding/Abstract