Electrical properties of thermally grown HfO2 and HfO 2/TiO2/HfO2 MIM capacitors fabricated on SiO2/Si substrate and HfO2 MIM capacitors fabricated on sapphire (2007)

First Author: Alton Horsfall (Author)
Attributed to:  Technologies for SiC electronics and sensors in extreme environments funded by EPSRC

Abstract

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Bibliographic Information

Type: Conference/Paper/Proceeding/Abstract