Electrical properties of thermally grown HfO2 and HfO 2/TiO2/HfO2 MIM capacitors fabricated on SiO2/Si substrate and HfO2 MIM capacitors fabricated on sapphire (2007)
Attributed to:
Technologies for SiC electronics and sensors in extreme environments
funded by
EPSRC
Abstract
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Bibliographic Information
Type: Conference/Paper/Proceeding/Abstract