Gallium Nitride Smart Power Integrated Circuit Technology (GaN SPICe)
Lead Research Organisation:
University of Glasgow
Department Name: School of Engineering
Abstract
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Organisations
Publications
Crawford K
(2022)
High synergy atomic layer etching of AlGaN/GaN with HBr and Ar
in Journal of Vacuum Science & Technology A
| Description | EPSRC-SFI Aluminium-Rich Nitride Electronics (ARNE) |
| Amount | £597,833 (GBP) |
| Funding ID | EP/X036901/1 |
| Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 01/2024 |
| End | 12/2026 |