On the prospects of using Biogenic Silica for MEMS (Micro-Electro-Mechanical Systems) (2019)

Abstract

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Bibliographic Information

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85102498316

Type: Other

Volume: 2240

Parent Publication: Lecture Notes in Engineering and Computer Science

ISSN: 20780966 20780958