Exploiting emergent collective behaviours in complex large MEMS systems
Lead Research Organisation:
University of Oxford
Department Name: Engineering Science
Abstract
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Organisations
People |
ORCID iD |
| Steve Collins (Principal Investigator) |
Publications
Choubey B
(2010)
Characterization of coupled micro/nanoresonators using inverse eigenvalue analysis
in Applied Physics Letters
Anthony C
(2010)
Fabrication and quality factor control of a microelectromechanical system resonator with linear differential drive
in IET Science, Measurement & Technology
Choubey B
(2012)
On Characterizing Microelectromechanical Processes Using Coupled Resonators
in Journal of Microelectromechanical Systems
C Deng
(2010)
Sensitivity Enhancement using a non-linear resonator
| Description | Microelectromechanical (MEMs) resonant sensors are so small that it is possible for huge numbers to be integrated into a small area. However, it is then impossible to contact each of the sensors. Within the project a novel method of monitoring the response of many sensors using only two common contacts has been devised and demonstrated. The same method can also be used to characterise the unavoidable variations between nominally identical resonators. |
| Exploitation Route | In the future this work could lead to improved MEMs based resonant sensors for a range of applications including chemical detection, The most appropriate exploitation route is via the manufacturers of MEMs systems. |
| Sectors | Electronics Environment Healthcare Manufacturing/ including Industrial Biotechology Security and Diplomacy |