Phase Change Memory Materials via Non-Aqueous Electrodeposition into Nano-structured Templates

Lead Research Organisation: University of Southampton
Department Name: Sch of Chemistry

Abstract

This project is concerned with developing non-aqueous electrochemical methods and suitably tailored reagents to facilitate spatially selective electrodeposition of binary (e.g. In2(Se,Te)3, Sb2(Se,Te)3, Ge(Se,Te)) and the ternary chalcogenide materials (e.g. Ge2Sb2Te5, doped Sb2Te3) for applications in solid-state phase change memory (PCM). The key objectives are to demonstrate successful deposition of the target materials inside nano-scale (down to 2 nm) confined cell structures and to establish the effect of down-scaling pore size on the deposition process. Successful electrodeposition of well-defined compound semiconductor alloy compositions of these types will provide a significant new enabling technology which could also have a major impact on the other applications requiring semiconductor alloy deposition on a nano-scale. Using non-aqueous solvents (such as MeCN, propylene carbonate or chlorofluorocarbons) will bring several advantages over aqueous processes:(i) the use of a much wider range of reagents which can be tailored to the application;(ii) access to more reactive alloy compositions;(iii) a wider range of deposition potentials,while these solvents are more readily available, less expensive, much more easy to purify and less viscous (important for penetrating narrow. high aspect-ratio pores) than for example ionic liquids.These chalcogenide alloys are of major interest for phase change memory (PCM) materials - an emerging technology for non-volatile memory which is expected to compete with (and even replace) FLASH memory in specialist and everyday consumer electronics. Production of these alloys by electrodeposition could bring several advantages over current methods of production (mainly PVD), since it allows spatially selective deposition (since the materials are only deposited on the electrode surface), filling the pores of the templates from the bottom, hence enabling complete filling even of very narrow nanopores - leading to a very significant reduction of the dimensions of each individual cell, and hence potentially much higher cell density. In turn this will lead to faster switching between the crystalline and non-crystalline phases, leading to smaller devices and greater energy efficiency. To achieve these targets requires a multidisciplinary approach involving several key contributions: (i) to develop (and refine) new tailored molecular compounds (electrochemical reagents) with elements from the p-block (gallium, indium, germanium, antimony) in combination with groups containing the chalcogens i.e. the elements selenium and tellurium; (ii) to use these as reagents for the growth of the binary & ternary alloy materials by electrochemical deposition into nano-structured silica or alumina templates comprised of very narrow parallel pores with well-defined diameters between 1000 nm and 2 nm; (iii) characterisation of the deposited materials to determine the element ratios present (composition), their crystal structures, and phase change properties;(iv) deposition of the 'best' compositions into well-defined pores on a chip array to allow switching of the arrays memory cells in an actual device, hence demonstrating the true potential of this new approach.The team of investigators brings together a complementary and internationally unique set of skills and expertise to achieve these targets, while the input from our Project Partners, Ilika Technologies Ltd will add considerable value to the project.

Planned Impact

The research described in this proposal will develop non-aqueous electrodeposition as an enabling technology for the controlled growth of binary and ternary semiconductor alloys inside nano-structured templates. The target application is solid-state phase change memory. The work has potential in the short to medium term to have very considerable impact in the field and is likely to attract much interest to companies engaged in materials discovery for a wide range of applications, in addition to those semiconductor companies in the private sector working on PCM manufacture, as indicated in the attached Letter of Support from Ilika Technology Ltd. PCM is a very timely and topical area of research since it is an emerging technology that has the capacity to compete with FLASH memory in specialist and consumer electronic devices. One of the key stumbling blocks at present is the difficulty in down-scaling the memory cell size to the targets set out in the Semiconductor Roadmap - our method has a really good chance of achieving this, since the deposition can only occur at the electrode surface - i.e. at the bottom of the nano-pores. Furthermore, electrodeposition allows control over the thickness of the deposit, simply by switching off the potential. Thus, growing the alloys to a specific (regular) depth inside very narrow pores using our approach is entirely feasible. Key targets are to develop reagents which can be used to demonstrate successful deposition of the target compositions via the non-aqueous electrochemical method, and to demonstrate that these materials can be grown inside the pores of nano-structures of diameter 1000 to 2 nm. Phase change media feature strongly in the new EPSRC-supported Centre for Nanostructured Photonic Metamaterials in the University of Southampton. Discussions with colleagues there have already indicated considerable interest in the electrodeposition of PCMs as an enabling technology and we will be active in exploiting new opportunities arising in this area too. In addition to the IP arising from this work (which we intend to protect through patent applications and exploit with advice and expertise from staff in the Research & Innovation Services in the University of Southampton), the project has the potential to deliver very high impact publications - internationally leading journals such as Nature Materials, Advanced Materials, JACS and Angewandte Chemie will be targeted. The relevance of the topic of this research project and their end applications mean that it lends itself extremely well to public (consumer) dissemination. The investigators have established track records in outreach and the 'promotion of science' to non-specialist audiences and will be active in pursuing these dissemination pathways e.g. through talks and workshops for schools, science fairs etc., articles in newsletters, Education in Chemistry, Chem. & Eng. News etc. Support in the preparation of suitable news items and flyers will be provided by our marketing expert in the Faculty (C. Mills).

Publications

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Benjamin SL (2013) Area Selective Growth of Titanium Diselenide Thin Films into Micropatterned Substrates by Low-Pressure Chemical Vapor Deposition. in Chemistry of materials : a publication of the American Chemical Society

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Everett M (2014) Unexpected neutral aza-macrocycle complexes of sodium. in Chemical communications (Cambridge, England)

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Everett M (2015) Cationic aza-macrocyclic complexes of germanium(II) and silicon(IV). in Dalton transactions (Cambridge, England : 2003)

 
Description This work has developed a highly versatile non-aqueous electrolyte system that can be used electrodeposit a wide range of technologically important semiconducting materials. This has been demonstrated specifically for one of the most challenging targets, the ternary alloy Ge2Sb2Te5. We have also shown that by varying the relative concentrations of the 3 custom-made precursor compounds (to supply the individual elements in the alloy) and by varying the deposition potential, it is possible to adjust the stoichiometry in a very controlled manner across the whole phase diagram and to create individual memory cells on the 50-100 nm scale. Device structures based upon these cells can be repeatedly switched between the amorphous and crystalline phases with good endurance and resistance ratio - key demonstrators of device quality material.
Exploitation Route This work could be taken forward in a number of different ways - e.g. to develop multi-level memory devices, or by further scaling down the dimensions of the individual memory cells to sub 10 nm, to the point at which new memory architectures could be realised. The generality of our (patented) process also opens this approach to other application areas based upon other semiconducting materials, such as thermoelectrics.
Sectors Electronics,Energy

URL http://www.southampton.ac.uk/chemistry/research/projects/electrodeposition-of-semiconducting-chalcogenides-from-unusual-meida.page?
 
Description EPSRC Programme Grant
Amount £6,330,000 (GBP)
Funding ID EP/N035437/1 
Organisation Engineering and Physical Sciences Research Council (EPSRC) 
Sector Public
Country United Kingdom
Start 07/2016 
End 07/2021
 
Title A PROCESS FOR THE ELECTROCHEMICAL DEPOSITION OF A SEMICONDUCTOR MATERIAL 
Description A process for the electrochemical deposition of a semiconductor material, which process comprises: (i) providing a non-aqueous solvent; (ii) providing at least one precursor salt which forms a source of the constituent elements within the semiconductor material to be deposited; and (iii) electrodepositing the semiconductor material onto an electrode substrate using the precursor salt in the non-aqueous solvent, characterised in that: (iv) the semiconductor material is a p-block or a post-transition metal semiconductor material containing at least one p-block element or post-transition metal; and (v) the non-aqueous solvent is a halocarbon non-aqueous solvent. 
IP Reference WO2014016544 
Protection Patent granted
Year Protection Granted 2014
Licensed No
Impact n/a
 
Description Atoms Crystals & Diffraction 
Form Of Engagement Activity Participation in an open day or visit at my research institution
Part Of Official Scheme? No
Geographic Reach Regional
Primary Audience Public/other audiences
Results and Impact Activities sparked discussion with members of the public and school students

Invited to present at school science clubs
Year(s) Of Engagement Activity
 
Description Electrochemical Preparation of Nanostructured Phase Change Random Access Memory Devices 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach International
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact sparked discussions with other academic experts and with industry representatives

prompted requests for further information and invited lecture at international conference
Year(s) Of Engagement Activity 2014
 
Description Electrodeposition of Alloys for Phase Change Random Access Memory Applications 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach National
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact Prompted discussion re potential applications of the work

Increased interest from colleagues & peers
Year(s) Of Engagement Activity 2014
 
Description Electrodeposition of Phase Change Materials 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach International
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact Increased interest in the research in this project and its potential application.

Increased discussion with other researchers and companies.
Year(s) Of Engagement Activity 2012
 
Description Electrodeposition of Ternary Alloys for Phase Change Random Access Memory Applications 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach National
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact prompted discussion and questions

-
Year(s) Of Engagement Activity 2014
 
Description Electrodeposition of Ternary Alloys for Phase Change Random Access Memory Applications 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach International
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact prompted detailed discussions

-
Year(s) Of Engagement Activity 2014
 
Description GST in Nanostructures through Electrodeposition - a New Approach to the Preparation of Phase Change Materials 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach International
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact prompted requests for further information

-
Year(s) Of Engagement Activity
 
Description Miniaturisation of electronics components using electrodeposition 
Form Of Engagement Activity Participation in an activity, workshop or similar
Part Of Official Scheme? No
Geographic Reach National
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact sparked focussed discussion on application of electrochemistry in electronics

-
Year(s) Of Engagement Activity 2014
 
Description Preparation of Phase Change Materials through the Electrodeposition of Individual and Alloyed p-Block compounds 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach International
Primary Audience Other academic audiences (collaborators, peers etc.)
Results and Impact Awarded prize for oral presentation

Increased interest in research topic
Year(s) Of Engagement Activity 2012
 
Description Supercritical Fluid Electrodeposition 
Form Of Engagement Activity Participation in an open day or visit at my research institution
Part Of Official Scheme? No
Geographic Reach Regional
Primary Audience Public/other audiences
Results and Impact Stimulated discussion with members of the public; prompted application to exhibit at Royal Society Summer Exhibition (pending)

enthusiastic engagement and discussions
Year(s) Of Engagement Activity
 
Description UK Thermoelectrics Network Meeting 
Form Of Engagement Activity A talk or presentation
Part Of Official Scheme? No
Geographic Reach National
Primary Audience Professional Practitioners
Results and Impact Invited talk at the EPSRC Thermoelectric Meeting, Manchester, February 2017
Year(s) Of Engagement Activity 2017
 
Description school visit (Winchester) 
Form Of Engagement Activity Participation in an activity, workshop or similar
Part Of Official Scheme? No
Geographic Reach Local
Primary Audience Schools
Results and Impact activities stimulated enthusiastic discussion and engagement from pupils

invited back
Year(s) Of Engagement Activity