Next Generation Metrology Driven by Nanophotonics
Lead Research Organisation:
University of Huddersfield
Department Name: Sch of Computing and Engineering
Abstract
Optical metrology plays a vital role in an astonishing array of important research areas and applications, from basic science discovery to material processing, medicine, healthcare, energy, manufacturing and engineering. Optical metrology instruments are normally large, heavy structures that require a well-stabilised environment to maintain accuracy, stability and functionality. These physical and functional features prevent optical metrology from moving into future smart and autonomous applications across many sectors.
The proposed programme aims to challenge fundamental barriers to the use of optical measurement techniques in highly integrated, smart and autonomous 'Industry 4.0' metrology applications and emerging nanotechnologies, by establishing a unique, world-leading research collaboration in the UK that brings together advanced metrology and nanotechnology. It will translate the latest advances in nanophotonics, plasmonics and metamaterials research, in which the UK has played an internationally-leading role, into metrological applications. This will have a transformational impact on optical metrology by enabling cheaper, smarter and much more compact solutions. Research will be channelled through three complementary streams:
1. Nanophotonics-enabled components for metrology. This strand of the programme will draw on the wealth of recent fundamental developments in nanophotonics, for example, the fact that surfaces patterned with subwavelength-sized features can offer exquisite control over the wavefront of propagating light. Replacing one (or several) bulky element(s) with a single surface that carries out the same (combined) function offers hugely significant savings in size and weight, complexity and robustness (e.g. against misalignment), and opportunity to develop new measurement functionalities and instrumental configurations that are not otherwise possible.
2. Novel metrology concepts for nanotechnology. We will develop two ground-breaking ideas for metrological technologies: (1) The "optical ruler", which allows for non-contact displacement measurements with potentially sub-nm resolution using a sensor that could ultimately be manufactured on the tip of an optical fibre; (2) An approach to dynamic "nano-motion imaging" based upon the scanning electron microscopy (SEM) platform, to spatially map high-frequency nano- to picometre amplitude movement.
3. Novel metrology tools for manufacturing and nanotechnology. Using the nanophotonic components and concepts described above, we will develop novel metrology tools and measurement techniques to perform in real-world, as opposed to laboratory, conditions. Target applications will include, for example, surface/geometric metrologies compatible with manufacturing tools such as diamond turning machines and multi-axis (sub-) nanometric displacement encoding for translation stages.
This programme will bring together the expertise of world-leading research groups in metrology and nanophotonics, with key industrial project partners including Renishaw and Taylor Hobson. Together, we aim to address long-standing challenges for optical metrology and to develop new, disruptive metrological technologies. These advances will be vital to support the high-value manufacturing sector in the UK. The impact of this work, however, will be felt across a far broader range of disciplines, as size and weight are significant issues in, for example, instrumentation for space science, optical instrumentation for surgical applications, and robotic arm-mounted instruments.
The proposed programme aims to challenge fundamental barriers to the use of optical measurement techniques in highly integrated, smart and autonomous 'Industry 4.0' metrology applications and emerging nanotechnologies, by establishing a unique, world-leading research collaboration in the UK that brings together advanced metrology and nanotechnology. It will translate the latest advances in nanophotonics, plasmonics and metamaterials research, in which the UK has played an internationally-leading role, into metrological applications. This will have a transformational impact on optical metrology by enabling cheaper, smarter and much more compact solutions. Research will be channelled through three complementary streams:
1. Nanophotonics-enabled components for metrology. This strand of the programme will draw on the wealth of recent fundamental developments in nanophotonics, for example, the fact that surfaces patterned with subwavelength-sized features can offer exquisite control over the wavefront of propagating light. Replacing one (or several) bulky element(s) with a single surface that carries out the same (combined) function offers hugely significant savings in size and weight, complexity and robustness (e.g. against misalignment), and opportunity to develop new measurement functionalities and instrumental configurations that are not otherwise possible.
2. Novel metrology concepts for nanotechnology. We will develop two ground-breaking ideas for metrological technologies: (1) The "optical ruler", which allows for non-contact displacement measurements with potentially sub-nm resolution using a sensor that could ultimately be manufactured on the tip of an optical fibre; (2) An approach to dynamic "nano-motion imaging" based upon the scanning electron microscopy (SEM) platform, to spatially map high-frequency nano- to picometre amplitude movement.
3. Novel metrology tools for manufacturing and nanotechnology. Using the nanophotonic components and concepts described above, we will develop novel metrology tools and measurement techniques to perform in real-world, as opposed to laboratory, conditions. Target applications will include, for example, surface/geometric metrologies compatible with manufacturing tools such as diamond turning machines and multi-axis (sub-) nanometric displacement encoding for translation stages.
This programme will bring together the expertise of world-leading research groups in metrology and nanophotonics, with key industrial project partners including Renishaw and Taylor Hobson. Together, we aim to address long-standing challenges for optical metrology and to develop new, disruptive metrological technologies. These advances will be vital to support the high-value manufacturing sector in the UK. The impact of this work, however, will be felt across a far broader range of disciplines, as size and weight are significant issues in, for example, instrumentation for space science, optical instrumentation for surgical applications, and robotic arm-mounted instruments.
Planned Impact
Measurements are made constantly in industry, healthcare, environmental monitoring and many other aspects of everyday life. Technological progress and future competitiveness are thus fundamentally reliant upon advances in metrology. However, current optical metrology systems are running into technological constraints in terms of size, weight and flexibility. The development of ground-breaking nanophotonics-enabled metrology will be a key component in realising the UK government's plans for rebalancing the economy. In particular, non-contact, non-destructive optical metrologies are crucial for smart manufacturing, engineering and nanotechnology. Our Programme will be a major step forward in the global process of deriving true commercial and societal impact from the maturing field of nanophotonics and photonic metamaterials, in which the EPSRC has made substantial prior and continuing investment.
Economic impact: New technology and IP will be transferred via the UK innovation community e.g. our industrial Project Partners, High-value Manufacturing (HVM) Catapult and Photonics Leadership Group, and will deliver functionally advanced and robust sensors that are dramatically smaller and faster, leading to significantly enhanced flexibility of integration.
Societal impact: Consumers will benefit from access to new technologies resulting from the high-value manufacturing revolution, while the path demonstrated to generate light, robust, optical instrumentation with enhanced and new functionalities can be exploited more widely, for example in medical applications leading to improved outcomes in health and quality of life.
People: People are a critical aspect in the sustainability and long-term impact of any new technology. The programme will impact all tiers of the knowledge economy by establishing future leaders in metrology and nanophotonics research - developing a cohort of uniquely qualified early-career researchers and PhD students, trained in a highly agile research environment with strong industrial links.
Policy makers and public corporations: To promote wider understanding of our research we will use open access as a key dissemination principle of the Programme (dedicated website www.nanophotonics.org.uk, Wikipedia, Researcher ID and Google Scholar indices, video tutorials etc.). Key scientific results will be publicised through university and EPSRC communications offices, and in industry-oriented journals.
Economic impact: New technology and IP will be transferred via the UK innovation community e.g. our industrial Project Partners, High-value Manufacturing (HVM) Catapult and Photonics Leadership Group, and will deliver functionally advanced and robust sensors that are dramatically smaller and faster, leading to significantly enhanced flexibility of integration.
Societal impact: Consumers will benefit from access to new technologies resulting from the high-value manufacturing revolution, while the path demonstrated to generate light, robust, optical instrumentation with enhanced and new functionalities can be exploited more widely, for example in medical applications leading to improved outcomes in health and quality of life.
People: People are a critical aspect in the sustainability and long-term impact of any new technology. The programme will impact all tiers of the knowledge economy by establishing future leaders in metrology and nanophotonics research - developing a cohort of uniquely qualified early-career researchers and PhD students, trained in a highly agile research environment with strong industrial links.
Policy makers and public corporations: To promote wider understanding of our research we will use open access as a key dissemination principle of the Programme (dedicated website www.nanophotonics.org.uk, Wikipedia, Researcher ID and Google Scholar indices, video tutorials etc.). Key scientific results will be publicised through university and EPSRC communications offices, and in industry-oriented journals.
Organisations
- University of Huddersfield (Lead Research Organisation)
- Renishaw Plc (Collaboration)
- NANYANG TECHNOLOGICAL UNIVERSITY (Collaboration)
- Qioptiq Limited (Project Partner)
- HIGH VALUE MANUFACTURING CATAPULT (Project Partner)
- Photonics Leadership Group (Project Partner)
- QinetiQ (Project Partner)
- Renishaw plc (UK) (Project Partner)
- Nanyang Technological University (Project Partner)
- Taylor Hobson Ltd (Project Partner)
Publications

Ajia IA
(2021)
Gigahertz Nano-Optomechanical Resonances in a Dielectric SiC-Membrane Metasurface Array.
in Nano letters

Astratov V
(2023)
Roadmap on Label-Free Super-Resolution Imaging
in Laser & Photonics Reviews

Buchnev O
(2022)
Deep-Learning-Assisted Focused Ion Beam Nanofabrication.
in Nano letters

Chan E
(2023)
Counting and mapping of subwavelength nanoparticles from a single shot scattering pattern
in Nanophotonics

Chan J
(2023)
An ultra-compact metasurface-based chromatic confocal sensor
in CIRP Annals

Chi C
(2024)
Robust optical picometrology through data diversity
in Optical Materials Express

Engheta N
(2023)
Nanophotonics in support of Ukrainian Scientists.
in Nanophotonics (Berlin, Germany)


He F
(2022)
Coherently switching the focusing characteristics of all-dielectric metalenses.
in Optics express

Henning A
(2022)
Towards metasurfaces for metrological applications
Title | Zepler Institute Virtual Tour |
Description | Online virtual tour of Zerpler Institute cleanroom facilities and research laboratories |
Type Of Art | Film/Video/Animation |
Year Produced | 2021 |
Impact | Recognition of research excellence and leadership; International visibility for UK research |
URL | https://my.matterport.com/show/?m=3co4yM4Muiv |
Description | 2022-23 The programme grant has put significant effort into the career and skills development of its researchers and students over the last year with three students attending a summer school at the University of St Andrews. In particular, one student, Daniel Townend has had several notable successes, winning best presentation at the Future Metrology Hub's Early Career Research Symposium and gaining a scholarship from the Worshipful Company of Scientific Instrument Makers. In early 2023, the team held a strategy retreat bringing together the consortium's research team along with a number of international experts to discuss the latest scientific development relevant to the field. Programme grant work is now actively being promoted through engagement events with Dr Andrew Henning running an exhibition stand at NPL's Metamaterials Showcase and a team attending the Photon 2022 conference. |
First Year Of Impact | 2022 |
Sector | Electronics,Manufacturing, including Industrial Biotechology,Other |
Impact Types | Policy & public services |
Description | Government Office for Science Technology Assessment on "Photonic Technologies" |
Geographic Reach | National |
Policy Influence Type | Participation in a guidance/advisory committee |
URL | https://www.gov.uk/government/organisations/government-office-for-science |
Title | Dataset for Integrated terahertz generator-manipulators using epsilon-near-zero-hybrid nonlinear metasurfaces |
Description | This research dataset should be interpreted and understood in the context of the corresponding manuscript, which has been published in Nano Letters with DOI: 10.1021/acs.nanolett.1c02372. All relevant information regarding the dataset, how it was obtained and its context is contained in the manuscript. The data correspond to the data shown in the figures of the manuscript. |
Type Of Material | Database/Collection of data |
Year Produced | 2021 |
Provided To Others? | Yes |
URL | https://eprints.soton.ac.uk/451172/ |
Description | Nanyang Technological University, Singapore |
Organisation | Nanyang Technological University |
Country | Singapore |
Sector | Academic/University |
PI Contribution | Work on joint projects pertaining to development of new materials for metamaterials (dielectrics, chalcogenides), nano-opto-mechanical metamaterials, coherent control with metamaterials, and deeply-subwavelength (esp. superoscillatory and AI-assisted) imaging and metrology. |
Collaborator Contribution | Work on joint projects pertaining to new materials for metamaterials (perovskites and topological insulators), as well as metamaterials based on low dimensional TMDC (inc. near-field spectroscopy of such structures), and quantum effects in coherent control, and and deeply-subwavelength (esp. superoscillatory and AI-assisted) imaging and metrology. |
Impact | Joint publications and conference papers, and patent filings |
Start Year | 2015 |
Description | Renishaw/RAEng Professorial Chair - Extension |
Organisation | Renishaw PLC |
Country | United Kingdom |
Sector | Private |
PI Contribution | Research carried out in areas of strategic importance to the funder |
Collaborator Contribution | Cash funding for professorial chair. Participation in advisory boards and industry days |
Impact | Academic papers New IP |
Start Year | 2022 |
Description | Dr Andrew Henning - Exhibiting at the NPL Metamaterial Showcase |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | National |
Primary Audience | Professional Practitioners |
Results and Impact | DR Andrew Henning ran a display stand of Future Metrology Hub and Programme Grant work at the NPL Metamaterials Showcase |
Year(s) Of Engagement Activity | 2022 |
Description | Early Career Researcher Symposium |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | National |
Primary Audience | Professional Practitioners |
Results and Impact | Early Career Researchers Symposium held to advance the research work of ERCs from across the Hub consortium and wider partners and also to provide career development and skills training. Held over two days at Loughborough University |
Year(s) Of Engagement Activity | 2022 |
Description | Hub Convention |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | National |
Primary Audience | Other audiences |
Results and Impact | A 3-day event with presentations, posters and exhibition showcasing the outcomes of the Hub. Academic and industry partners were in attendance. |
Year(s) Of Engagement Activity | 2023 |
Description | Ingenia article |
Form Of Engagement Activity | A magazine, newsletter or online publication |
Part Of Official Scheme? | No |
Geographic Reach | International |
Primary Audience | Public/other audiences |
Results and Impact | Article on "Metamaterials, metalenses and beyond" by (Programme Co-I) Eric Plum in the Royal Academy of Engineering's magazine, Ingenia |
Year(s) Of Engagement Activity | 2022 |
URL | https://www.ingenia.org.uk/ingenia/issue-91/metamaterials,-metalenses-and-beyond |
Description | Met & Props 2022 |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | International |
Primary Audience | Professional Practitioners |
Results and Impact | The Hub hosted the 23rd International Conference on Metrology and Properties of Engineering Surfaces. Prof. Liam Blunt was conference chair and the event was held in collaboration with the University of Strathclyde. The event included an exhibition with 8 companies in attendance (Digital Surf, Bruker, Polytec, Olympus, IOP, Keyence, Optimax and Cubit) |
Year(s) Of Engagement Activity | 2022 |
Description | Participated at the UKMMN showcase event in Leeds 2023 |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | National |
Primary Audience | Other audiences |
Results and Impact | Presented material at the UK metamaterial network showcase event in Leeds, engaging with the network members |
Year(s) Of Engagement Activity | 2023 |
Description | Phys.org article: Topologically structured light detects the position of nano-objects with atomic resolution |
Form Of Engagement Activity | A magazine, newsletter or online publication |
Part Of Official Scheme? | No |
Geographic Reach | International |
Primary Audience | Media (as a channel to the public) |
Results and Impact | News article on our Nature Materials publication "Picophotonic localization metrology beyond thermal fluctuations" [Nat. Mater. 22, 844 (2023)] published by phys.org |
Year(s) Of Engagement Activity | 2023 |
URL | https://phys.org/news/2023-05-topologically-position-nano-objects-atomic-resolution.html |
Description | Prof Dame Jane Jiang speaks to Henry Royce Institute Hub |
Form Of Engagement Activity | A talk or presentation |
Part Of Official Scheme? | No |
Geographic Reach | Regional |
Primary Audience | Professional Practitioners |
Results and Impact | Jane Jiang invited to speak at the Materials in Manufacturing the Future seminar series at the Henry Royce Institute Hub at the University of Manchester on 27/10/22. A lot of interest was shown, with lots of discussion afterwards. |
Year(s) Of Engagement Activity | 2022 |
Description | Surface Metrology School |
Form Of Engagement Activity | Participation in an activity, workshop or similar |
Part Of Official Scheme? | No |
Geographic Reach | Local |
Primary Audience | Postgraduate students |
Results and Impact | Annual Surface Metrology School held for University of Huddersfield post-graduate students with subjects relating to measurement of surfaces |
Year(s) Of Engagement Activity | 2022 |