A hybrid precision manufacturing platform for next-generation of nanoscale products
Lead Research Organisation:
University of Strathclyde
Department Name: Design Manufacture and Engineering Man
Abstract
To ensure UK industry's global leadership in advanced manufacturing and the need to access to the multi-billion pounds nanoscale products market, building on Strathclyde's world-leading research in hybrid machine design and rolling nanoelectrode lithography (RNEL) technology, this proposal attempts to establish a new flexible and reconfigurable hybrid precision manufacturing platform (HPMP) for low-cost and high-throughput production of nanoscale products possessing various structures from ground-breaking sub-nanometre to micrometre scales, with nanoscale precision over large areas (cm^2 in this project, but scalable to m^2) of various materials.
This low-cost nanoscale precision 'lab-to-fab' low-to-medium volume production platform will significantly enhance the producibility and productivity of nanoscale products for information communication technology (ICT), photonic, semiconductor, microelectronic and emerging quantum technology industry sectors to address the grand challenges of an AI & data-driven economy (Internet of Things (IoTs), data storage, quantum computing & communication devices), clean growth (plasmonic solar cells), future mobility (light detection and ranging) and an aging society (medical detection & diagnostic devices) in accordance with the UK Industrial Strategy.
The project will transform the research outcome to industry and our society through knowledge exchange, training, industrial demonstration and deployment.
This low-cost nanoscale precision 'lab-to-fab' low-to-medium volume production platform will significantly enhance the producibility and productivity of nanoscale products for information communication technology (ICT), photonic, semiconductor, microelectronic and emerging quantum technology industry sectors to address the grand challenges of an AI & data-driven economy (Internet of Things (IoTs), data storage, quantum computing & communication devices), clean growth (plasmonic solar cells), future mobility (light detection and ranging) and an aging society (medical detection & diagnostic devices) in accordance with the UK Industrial Strategy.
The project will transform the research outcome to industry and our society through knowledge exchange, training, industrial demonstration and deployment.
Organisations
- University of Strathclyde (Lead Research Organisation)
- Vrije Universiteit Brussel (Collaboration)
- Holoxica (Collaboration)
- University of Oxford (Collaboration)
- National University of Singapore (Collaboration)
- Loadpoint Ltd (Project Partner)
- National Manufacturing Institute Scotland (Project Partner)
- Aerotech Ltd (Project Partner)
- Holoxica Ltd (Project Partner)
- MNA Innovation Ltd (Project Partner)
Publications
Fan P
(2023)
Oblique nanomachining of gallium arsenide explained using AFM experiments and MD simulations
in Journal of Manufacturing Processes
Fan P
(2022)
Scanning Probe Lithography: State-of-the-Art and Future Perspectives.
in Micromachines
Fan P
(2022)
Uniaxial pulling and nano-scratching of a newly synthesized high entropy alloy
in APL Materials
Fang F
(2022)
Nanometric cutting: Mechanisms, practices and future perspectives
in International Journal of Machine Tools and Manufacture
Gao J
(2023)
Atomistic insights into bias-induced oxidation on passivated silicon surface through ReaxFF MD simulation
in Applied Surface Science
Gao J
(2022)
Insight into Atomic-Scale Adhesion at the C-Cu Interface During the Initial Stage of Nanoindentation
in Nanomanufacturing and Metrology
Gao J
(2021)
Fundamentals of atomic and close-to-atomic scale manufacturing: a review
in International Journal of Extreme Manufacturing
Gao J.
(2022)
Three-dimensional nanostructures enabled by customised voltage waveform-induced local anodic oxidation lithography
in European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022
| Description | Etonal gas was found to be very effective to accelerate oxidization rate and thus enhance the nanofabcaiton efficiency. The nanoelectrode lithography process can be controlled through applied electric voltage, plus width and rolling speed of imprint roller. |
| Exploitation Route | We have secured a UK patent protection and we have secured EPSRC IAA funding in December 2024 to improve the TRL level and is working on application of Scottish High Growth Spin out programme to commercialize the technology. |
| Sectors | Aerospace Defence and Marine Chemicals Electronics Energy Environment Healthcare Manufacturing including Industrial Biotechology Pharmaceuticals and Medical Biotechnology |
| Description | We have already applied our findings on a hybrid nanomanufacturing platform which was commissioned in September 2024. We are working on producing some project demonstrator for a research collaborator from Department of Physics of University of Oxford for manufacturing next-generation of Terahertz cameras. |
| First Year Of Impact | 2024 |
| Sector | Aerospace, Defence and Marine,Chemicals,Healthcare,Manufacturing, including Industrial Biotechology,Pharmaceuticals and Medical Biotechnology |
| Impact Types | Economic |
| Description | Contribution to national digital twin network |
| Geographic Reach | National |
| Policy Influence Type | Participation in a guidance/advisory committee |
| Impact | It will inform the DT network and form a new feasibility call |
| Description | UK Manufacturing Forum-policy on sustainable manufacturing |
| Geographic Reach | National |
| Policy Influence Type | Contribution to a national consultation/review |
| Description | A digital twin of precision machining approach for luxury watch component |
| Amount | £322,298 (GBP) |
| Organisation | Knowledge Transfer Partnerships |
| Sector | Charity/Non Profit |
| Country | United Kingdom |
| Start | 08/2025 |
| End | 07/2028 |
| Description | Towards deterministic atomic scale manufacturing of next-generation quantum devices |
| Amount | £204,031 (GBP) |
| Funding ID | EP/X021963/1 |
| Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
| Sector | Public |
| Country | United Kingdom |
| Start | 01/2023 |
| End | 12/2024 |
| Description | Transforming Nanomanufacturing: Accelerating Market Impact of Flexible Nanoelectrode Lithography Technology |
| Amount | £49,946 (GBP) |
| Funding ID | 11603R220416-101 |
| Organisation | University of Strathclyde |
| Sector | Academic/University |
| Country | United Kingdom |
| Start | 12/2024 |
| End | 02/2026 |
| Title | Data for: "Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF MD Simulations" |
| Description | This dataset includes the data from simulation results. Including evolution of bond/particle numbers, bond/particle countings, MSDs. The data can be read using notepad. |
| Type Of Material | Database/Collection of data |
| Year Produced | 2024 |
| Provided To Others? | Yes |
| Impact | The dataset has been used by researchers worldwide to reveal the surface oxidation of silicon surface |
| Title | Data for: "Atomistic insights into bias-induced oxidation on passivated silicon surface through ReaxFF MD simulation" |
| Description | The dataset includes numerical data to describe the projected density of states for C-Cu bonding pair, adhesion energies and total energies of tip-slab systems. The data can be read by MS excel. |
| Type Of Material | Database/Collection of data |
| Year Produced | 2023 |
| Provided To Others? | Yes |
| Impact | The dataset has been used by researchers from other countries to explore material science |
| URL | https://doi.org/10.15129/773fb2bc-7a7e-49de-96e5-04b55251f2db |
| Title | Data for: "Insight into atomic-scale adhesion at the C/Cu interface during initial stage of nanoindentation" |
| Description | This dataset includes the data from simulation results. Including evolution of bond/particle numbers, bond/particle distributions, charge distributions. The data can be read using notepad. |
| Type Of Material | Database/Collection of data |
| Year Produced | 2022 |
| Provided To Others? | Yes |
| Impact | The data has been used by researcher to explore nanotribology mechanism |
| URL | https://doi.org/10.15129/8623a376-5f47-4cca-953e-9567c5b2cf63 |
| Title | Data for: "Uniaxial pulling and nano-scratching of a newly synthesised high entropy alloy" |
| Description | The dataset contains numerical data to illustrate the relationship between machined depth and cutting forces including friction force and normal force. The data can be read by using excel software. |
| Type Of Material | Database/Collection of data |
| Year Produced | 2024 |
| Provided To Others? | Yes |
| Impact | The dataset has been used by researchers in the world to explore machinability of high entropy alloy. |
| URL | https://doi.org/10.15129/118b0a4f-c5bc-4d92-948b-f64657e5a144 |
| Description | Collaboration with University of Oxford on nanofabrication |
| Organisation | University of Oxford |
| Department | Department of Physics |
| Country | United Kingdom |
| Sector | Academic/University |
| PI Contribution | My research team will work on development of best-spoke nanofabrication process for terahertz camera lens which will be one of project demonstrator of our project. |
| Collaborator Contribution | Consultation on potential applications of our nanoelectrode lithography technology and provide terahertz camera design, fabrication process development, plus lab access for testing demonstrators made by us. |
| Impact | We will have jointly publication to report outcome of this collaboration |
| Start Year | 2025 |
| Description | Fabrication of atomic clock in collaboration with National University Singapore |
| Organisation | National University of Singapore |
| Country | Singapore |
| Sector | Academic/University |
| PI Contribution | We are investigating if our proposed RNEL approach will be useful to fabricate atomic clock |
| Collaborator Contribution | Researchers from NUS provide design of atomic clock and testing |
| Impact | We are in the process of research and hopefully we can report good result next year. The process is still in final stage of development. |
| Start Year | 2022 |
| Description | Fabrication of fibre alignment device |
| Organisation | Vrije Universiteit Brussel |
| Country | Belgium |
| Sector | Academic/University |
| PI Contribution | My team is working on hybrid machining the fibre alignment device and comparing with our digital twin-drive automation approach. |
| Collaborator Contribution | Provide design of the fibre alignment device. |
| Impact | We are working on the study at the moment and will report the outcome in next submission. |
| Start Year | 2022 |
| Description | Ultra precision diamond turning diffractive optics for 3D holographic system |
| Organisation | Holoxica |
| Country | United Kingdom |
| Sector | Private |
| PI Contribution | Consultancy service to support the company's product development. |
| Collaborator Contribution | Research team at Strathclyde has diamond turned two diffractive optics to support the company to develop the 3D holographic system. The team also help characterise the surface roughness, form accuracy of the machine diffractive optics. |
| Impact | The company is satisfied with the quality of the machined optics after optical testing. We will continue to support the company to machine larger optics. The collaboration also help us to find new potential international collaborations with Fraunhofer Heinrich-Hertz-Institutfrom and KIT, both in Germany. |
| Start Year | 2016 |
| Title | Improvements in relation to microlithography or nanolithography apparautus' and processes |
| Description | We have invent flexible roller for micro and nano lithography and a gas-assisted process to enhance fabrication productivity by 10 times. |
| IP Reference | |
| Protection | Patent / Patent application |
| Year Protection Granted | 2024 |
| Licensed | No |
| Description | 3rd International Academy of Engineering and Technology Symposium |
| Form Of Engagement Activity | Participation in an activity, workshop or similar |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Postgraduate students |
| Results and Impact | Organised an international Symposium on Digital Manufacturing and ACSM. 12 keynote speakers were invited to give talk on latest digital manufacturing and ACSM research. |
| Year(s) Of Engagement Activity | 2021 |
| URL | https://www.aet-ac.org/copy-of-aet-symposium |
| Description | A Keynote talk on International Conference and Expo on Optics, Photonics and Lasers |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Postgraduate students |
| Results and Impact | Over 200 postgraduates attended the talk, which spark discussion on application of digital twin for photonics manufacturing. The department reported increased interests in digital twins. |
| Year(s) Of Engagement Activity | 2023 |
| URL | https://signatureconferences.com/europl2023/ |
| Description | A keynote talk on Cutting Simulation International Conference 2023 |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Postgraduate students |
| Results and Impact | over 200 postgraduate students attended the talk, which sparked intensive discussion on modelling techniques for photonics manufacturing, and the department reported increased interests in computational materials student projects. |
| Year(s) Of Engagement Activity | 2023 |
| Description | A keynote talk on IEEE Nanotechnology Materials and Devices International Conference |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Postgraduate students |
| Results and Impact | over 200 postgraduates attend my talk, with sparked discussion on new nanofabrication approach , and the department reported increased interests in nanofabrication |
| Year(s) Of Engagement Activity | 2023 |
| URL | https://ieeexplore.ieee.org/xpl/conhome/10343386/proceeding |
| Description | An invited talk on 10th International Conference of Asian Society for Precision Engineering and Nanotechnology |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Postgraduate students |
| Results and Impact | over 200 postgraduates attend the talk which provoke discussion on new control paradigm, the department reported more research projects were set up in precision motional control |
| Year(s) Of Engagement Activity | 2023 |
| URL | https://www.polyu.edu.hk/sklumt/ASPEN2023/ |
| Description | An invited talk on 2023 World Congress on Micro and Nano Manufacturing |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Postgraduate students |
| Results and Impact | Over 150 delegates including academics, postgraduates students, professionals and NSF programme manager attends the talk, which sparked questions and discussion on role of artificial intelligence and its relationship with physical model and potential application in micro and nanomanufacturing. The school reported increased interest in AI and the NSF programme manager reported more proposal application of using AI in micro and nano manufacturing. |
| Year(s) Of Engagement Activity | 2023 |
| URL | https://www.wcmnm2023.northwestern.edu/ |
| Description | Invited talk at Henry Royce Institute |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | National |
| Primary Audience | Other audiences |
| Results and Impact | 50 academics attended in-personal or on-line, which provoke discussion on multiscale digital twin approach for smart manufacturing, and the organiser feedbacked request on asking for slides or permission to share the video on Yourtube |
| Year(s) Of Engagement Activity | 2022 |
| Description | Invited talk on 7th International Conference on Nanomanufacturing |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Postgraduate students |
| Results and Impact | Give an invited talk on new nanomanufacturing approach. over 200 postgraduates listened to the talk. The talk has encouraged more applications to PhD student at Xi'an Jiaotong University. |
| Year(s) Of Engagement Activity | 2021 |
| Description | Invited talk on IEEE International Conference of Optical Imaging and Measurement |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Professional Practitioners |
| Results and Impact | Give talk on manufacturing of precision moulds and dies by nanosecond laser. It sparked discussion on application of laser to generated functional surface in the field of aerospace industry. |
| Year(s) Of Engagement Activity | 2021 |
| Description | Keynote talk on 7th Asia Pacific International Conference on Optics Manufacturing |
| Form Of Engagement Activity | A talk or presentation |
| Part Of Official Scheme? | No |
| Geographic Reach | International |
| Primary Audience | Professional Practitioners |
| Results and Impact | Keynote talk on ultra precision machining nanooptics. Over 100 Pupils from Shanghai Middle School listen the talk and encourage more applications to Fudan University (Shanghai) in the subject of optics manufacturing. |
| Year(s) Of Engagement Activity | 2021 |
| Description | Keynote talk to EPSRC Early Career Forum Workshop |
| Form Of Engagement Activity | A formal working group, expert panel or dialogue |
| Part Of Official Scheme? | No |
| Geographic Reach | National |
| Primary Audience | Other audiences |
| Results and Impact | Over 10 EPSRC Engineering Early Career Researchers attended the work. It sparked discussion multiscale digital twin driven smart manufacturing system. |
| Year(s) Of Engagement Activity | 2023 |