Nanoscale characterisation of nitride semiconductor thin films using EBSD, ECCI, CL and EBIC
Lead Research Organisation:
University of Oxford
Department Name: Materials
Abstract
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People |
ORCID iD |
Angus Wilkinson (Principal Investigator) |
Publications
Meisnar M
(2015)
Using transmission Kikuchi diffraction to study intergranular stress corrosion cracking in type 316 stainless steels.
in Micron (Oxford, England : 1993)
Britton T
(2016)
Tutorial: Crystal orientations and EBSD - Or which way is up?
in Materials Characterization
Rikarte J
(2020)
Surface Evolution of Lithium Titanate upon Electrochemical Cycling Using a Combination of Surface Specific Characterization Techniques
in Advanced Materials Interfaces
Naresh-Kumar G
(2012)
Rapid nondestructive analysis of threading dislocations in wurtzite materials using the scanning electron microscope.
in Physical review letters
Naresh-Kumar G
(2017)
Quantitative imaging of anti-phase domains by polarity sensitive orientation mapping using electron backscatter diffraction.
in Scientific reports
Naresh-Kumar G
(2022)
Non-destructive imaging of residual strains in GaN and their effect on optical and electrical properties using correlative light-electron microscopy
in Journal of Applied Physics
Wilkinson A
(2014)
Measurement of probability distributions for internal stresses in dislocated crystals
in Applied Physics Letters
Vilalta-Clemente A
(2015)
High-Resolution Electron Backscatter Diffraction in III-Nitride Semiconductors
in Microscopy and Microanalysis
Trager-Cowan C
(2014)
Electron Channeling Contrast Imaging of Defects in III-Nitride Semiconductors
in Microscopy and Microanalysis
Winkelmann A
(2017)
Diffraction effects and inelastic electron transport in angle-resolved microscopic imaging applications.
in Journal of microscopy
Description | We have used electron backscatter diffraction (EBSD) to measure the variation in lattice rotations and strains in II-V nitride thin films grown in various collaborators labs. In combination with electron channelling contrast imaging a methodology has been developed to allow quantification and separation of threading dislocation densities for screw edge and mixed defect types. This can be performed on the top surface of as grown structures removing the need for thin foil production and TEM observation and so allowing information to be provided to growers in a more quickly. Advances have also be made toward use of simulated EBSD patterns as reference patterns. Methods for interpolating intensity distributions calculated in a full dynamical diffraction simulations to allow matching to experimental patterns at lower computational cost have been explored. As have new routes for calibrating the pattern centre and camera length. |
Exploitation Route | EBSD method is providing useful materials characterisation information that is being feedback to materials growers. There is clearly scope for the method to be taken up for characterisation of other systems. SiC for power electronics being perhaps the most obvious target. The advances made in understanding and improving the sensitivity of the method has impact on wider application of the method for example we have been able to take on new applications where the dislocation density is relatively low including Si for solar photovoltaics, and deformation of upper mantle rocks (NERC funding) |
Sectors | Aerospace Defence and Marine Electronics Energy Environment Manufacturing including Industrial Biotechology |
URL | https://omg.web.ox.ac.uk/ |
Description | Better understanding of EBSD strain mapping method and visibility of the technique has improved both the quality and up-take of commercial products (hardware and software). Feedback of materials characterisation results has allowed growers to better understand materials being produced. |
First Year Of Impact | 2014 |
Sector | Aerospace, Defence and Marine,Electronics,Energy,Environment,Other |
Impact Types | Economic |
Description | NERC Award |
Amount | £483,386 (GBP) |
Funding ID | NE/M000966/1 |
Organisation | Natural Environment Research Council |
Sector | Public |
Country | United Kingdom |
Start | 01/2015 |
End | 01/2018 |
Description | Platform Grant - Characterisation |
Amount | £1,094,904 (GBP) |
Funding ID | EP/K032518/1 |
Organisation | Engineering and Physical Sciences Research Council (EPSRC) |
Sector | Public |
Country | United Kingdom |
Start | 05/2013 |
End | 05/2018 |
Description | Earth Science |
Organisation | University of Oxford |
Department | Department of Earth Sciences |
Country | United Kingdom |
Sector | Academic/University |
PI Contribution | We are transferring methodologies developed in Materials Science for EBSD mapping of lattice strain and dislocation densities to natural and synthetic minerals of interest to Earth Sciences. |
Collaborator Contribution | Identification of key Earth Science problems to which the methodology could be applied. In particular upper mantle rocks have been targeted as an initial application and a series of olivine samples have been worked on. Initial results were very promising and lead to a successful NERC funding application. The project is now fully active and funded and is likely to grow over the next few years. |
Impact | Multi-disciplinary collaboration involving transfer of methodologies from Materials Science to Earth Science Outputs to date have been conference presentations (no proceedings with ISSN) though two papers are currently under review |
Start Year | 2014 |